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Silicon Nanomembranes

 

Silicon nanomembranes are thin silicon layers that can be released from their substrates and redeposited on other surfaces. Such membranes are flexible and can be coherently strained, producing tensile strained silicon without the need for dislocation-driven relaxation of a SiGe virutal substrate.

 

Publication on this topic

Single-Crystal/Amorphous-Multilayer Heterostructures Based on Nanomembrane Transfer, Weina Peng , Michelle M. Roberts, Eric P. Nordberg, Frank S. Flack, Paula E. Colavita, Robert J. Hamers, Donald E. Savage, Max G. Lagally, and Mark A. Eriksson, Appl. Phys. Lett. 90, 183107 (2007). [Journal Article]

Elastically Relaxed Free-standing Strained-Si Nanomembranes, Michelle M. Roberts, Levente J. Klein, Don E. Savage, Keith A. Slinker, Mark Friesen, George Celler, Mark A. Eriksson, Max G. Lagally, Nature Materials 5, 388 (2006). [Journal Article]


Research Areas

Silicon Nanostructures

Quantum Computing

Silicon Valley Splitting

Silicon Nanomembranes

Intermittent Contact AFM

Nanowires and Nanorods