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Silicon Nanomembranes

Optical Image of a Membrane Trilayer

Silicon nanomembranes are single crystal silicon layers that are extremely thin. They can be released from their host substrate and redeposited on other surfaces. Such membranes are flexible and can be coherently strained, producing tensile strained silicon without the need for dislocation-driven relaxation of a SiGe virutal substrate. They can also be stacked, enabling the formation of structures such as single-crystal semiconductor/amorphous oxide multilayers that are otherwise extremely difficult to fabricate. The optical image shown here is of a single crystal silicon/amorphous oxide trilayer.

Selected publications on this topic:

"Thermal resistance of transferred silicon nanomembrane interfaces." D. P. Schroeder, Z. Aksamija, A. Rath, P. M. Voyles, M. G. Lagally, and M. A. Eriksson, Phys. Rev. Lett. 115, 256101 (2015). [Journal Article]

"Probing the electronic structure at semiconductor surfaces using charge transport in nanomembranes." W. Peng, Z. Aksamija, Shelley A. Scott, J. J. Endres, D. E. Savage, I. Knezevic, M. A. Eriksson, and M. G. Lagally, Nature Comm. 4, 1339 (2013). [Journal Article]

"Quantitative Determination of Contributions to the Thermoelectric Power Factor in Si Nanostructures." Hyuk Ju Ryu, Z. Aksamija, D. M. Paskiewicz, Shelley A. Scott, M. G. Lagally, I. Knezevic, and M. A. Eriksson, Phys. Rev. Lett. 105, 256601 (2010). [Journal Article]

"Influence of Surface Chemical Modification on Charge Transport Properties in Ultrathin Silicon Membranes." Shelley A. Scott, W. Peng, Arnold M. Kiefer, Hongquan Jiang, I. Knezevic, D. E. Savage, M. A. Eriksson, and M. G. Lagally, ACS Nano 3, 1683 (2009). [Journal Article]

"Excitation of longitudinal and transverse coherent acoustic phonons in nanometer free-standing films of (001) Si." Maher Harb, W. Peng, German Sciaini, Christoph T. Hebeisen, Ralph Ernstorfer, M. A. Eriksson, M. G. Lagally, Sergei G. Kruglik, and R. J. Dwayne Miller, Phys. Rev. B 79, 094301 (2009). [Journal Article]

"Electronically driven structure changes of Si captured by femtosecond electron diffraction." Maher Harb, Ralph Ernstorfer, Christoph T. Hebeisen, German Sciaini, W. Peng, Thibault Dartigalongue, M. A. Eriksson, M. G. Lagally, Sergei G. Kruglik, and R. J. Dwayne Miller, Phys. Rev. Lett. 100, 155504 (2008). [Journal Article]

"Single-crystal silicon/silicon dioxide multilayer heterostructures based on nanomembrane transfer." W. Peng, Michelle M. Roberts, E. P. Nordberg, F. Flack, P. E. Colavita, Robert J. Hamers, D. E. Savage, M. G. Lagally, and M. A. Eriksson, Appl. Phys. Lett. 90, 183107 (2007). [Journal Article]

"Electrical conductivity in silicon nanomembranes." P. P. Zhang, E. P. Nordberg, Byoung-Nam Park, I. Knezevic, Paul G. Evans, M. A. Eriksson, and M. G. Lagally, N. Journ. Phys. 8, 200 (2006). [Journal Article]

"Elastically relaxed free-standing strained-silicon nanomembranes." Michelle M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, Mark Friesen, George Celler, M. A. Eriksson, and M. G. Lagally, Nat. Mater. 5, 388 (2006). [Journal Article | arXiv]

"Electronic transport in nanometre-scale silicon-on-insulator membranes." P. P. Zhang, Emma Tevaarwerk, Byoung-Nam Park, D. E. Savage, George Celler, I. Knezevic, Paul G. Evans, M. A. Eriksson, and M. G. Lagally, Nature 439, 703 (2006). [Journal Article]

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